Capacitive pressure sensor having enhanced position and pressure detection accuracy

    公开(公告)号:US11965786B2

    公开(公告)日:2024-04-23

    申请号:US17838599

    申请日:2022-06-13

    CPC classification number: G01L1/14

    Abstract: There is provided a capacitive pressure sensor comprising: a dielectric layer; a first electrode disposed on a first surface of the dielectric layer and to which a pressure is applied; a second electrode disposed on a second surface of the dielectric layer opposite to the first surface and including a plurality of unit electrodes having a predetermined shape; and a measuring device configured to detect a measurement value of a capacitance of the dielectric layer for each unit electrode by causing a potential difference between the first electrode and the second electrode. An electrode area of the unit electrode is determined using an actual measurement data indicating a relationship between a change amount of the measurement value detected for each unit electrode by the measuring device when a pressure is applied to the first electrode and the electrode area of the unit electrode and using a minimum value of the change amount of the measurement value determined by conditions including the number of detection steps of a pressure detected for each unit electrode by the measuring device.

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