公开(公告)号：US20140216576A1

公开(公告)日：2014-08-07

申请号：US14172535

申请日：2014-02-04

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi SOMEYA ,  Hideto SAITO

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/006 ,  Y10T137/8376

Abstract: A gas lock device may include a chamber having a passage section and a connection hole that connects a surface to the passage section, an optical element that is attached to the chamber and seals the passage section, a gas supply apparatus, and a pipe that is attached at one end to the gas supply apparatus and attached at the other end to the chamber, and may define a flow channel communicating with the connection hole.

Abstract translation: 气体锁定装置可以包括具有通道部分和将表面连接到通道部分的连接孔的腔室，附接到腔室并密封通道部分的光学元件，气体供应装置和管子， 在一端连接到气体供应装置并且在另一端附接到腔室，并且可以限定与连接孔连通的流动通道。