公开(公告)号：US10914897B2

公开(公告)日：2021-02-09

申请号：US16217838

申请日：2018-12-12

Applicant: GLOBALFOUNDRIES INC.

Inventor： Hanyi Ding ,  John Ferrario ,  John Joseph Cartier ,  Benjamin Michael Cadieux

IPC: G02B6/36 ,  G02B6/30 ,  G02B6/35

Abstract: A probe device is configured to insert optical fiber probes directly into a v-groove coupler on an optical integrated circuit (IC) device. The probe device may include a probe holder comprising with a slot. A fiber holder may insert into the slot. The fiber holder may comprise a body with a first portion and second portion disposed at an angle relative to one another so that the first portion is shorter than the second portion. The body may have a bottom with grooves disposed therein, the grooves having dimensions to receive part of an optical fiber probes therein. In use, the fiber holder can arrange the optical fiber probes to extend into the v-grooves of the v-groove coupler of an optical IC on a wafer. The device may incorporate an alignment mechanism that permits the fiber holder to move or “self-align” in response to contact between the optical fiber probes and structure of the v-groove coupler of an optical IC on a wafer.