公开(公告)号：US09223911B2

公开(公告)日：2015-12-29

申请号：US14168133

申请日：2014-01-30

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jason E. Meiring ,  Mohamed Talbi ,  Ramya Viswanathan

IPC: G06F17/50

CPC classification number: G06F17/5009 ,  G03F1/44 ,  G03F7/70441 ,  G03F7/705 ,  G03F7/70625 ,  G06F17/5068

Abstract: Optical simulation can be performed employing a calibrated printing model, in which a unique phase transmission value is assigned to each type of sub-resolution assist features (SRAFs). The printing model can be calibrated employing a mask including multiple test patterns. Each test pattern is defined by a combination of a main feature, at least one SRAF applied to the main feature, and the geometrical relationship between the main feature and the at least one SRAF. Generation of the phase transmission values for each SRAF can be performed by fitting a printing model employing phase shift values and/or transmission values for SRAFs with measured printed feature dimensions as a function of defocus and/or with measured SRAF printing behavior on a printed photoresist layer. A properly calibrated printing model can predict the printed feature dimensions, shift in the best focus, and presence or absence of printed SRAFs.

Abstract translation: 可以使用校准的打印模型来执行光学仿真，其中将唯一的相位传输值分配给每种类型的分解辅助特征（SRAF）。 可以使用包括多个测试图案的蒙版来校准印刷模型。 每个测试图案由主要特征，应用于主要特征的至少一个SRAF以及主要特征与至少一个SRAF之间的几何关系的组合来定义。 可以通过对具有测量的印刷特征尺寸的SRAF的相移值和/或透射值拟合作为散焦的函数和/或在印刷的光致抗蚀剂上测量的SRAF印刷行为来拟合针对每个SRAF的相位透射值的生成 层。 正确校准的打印模型可以预测打印的特征尺寸，最佳焦点位移以及印刷的SRAF的存在或不存在。