公开(公告)号：US20140100806A1

公开(公告)日：2014-04-10

申请号：US13644788

申请日：2012-10-04

Applicant: GLOBALFOUNDRIES INC.

Inventor： Richard P. Good ,  Thorsten Schepers

IPC: G01N37/00 ,  G06F19/00

CPC classification number: G05B23/0237

Abstract: A method includes receiving tool trace data from a group of tools of the same type in a computing device. A tool fingerprint is generated for each tool using the tool trace data for the tools in group other than the tool for which the tool fingerprint is generated in the computing device. A tool score is generated for each tool based on its tool trace data and its associated fingerprint in the computing device. A fault condition with at least a selected tool is identified based on the tool scores in the computing device.

Abstract translation: 一种方法包括从计算设备中相同类型的一组工具接收工具跟踪数据。 使用工具的工具跟踪数据为每个工具生成工具指纹，而不是在计算设备中生成工具指纹的工具以外的工具。 根据其在计算设备中的工具跟踪数据及其相关指纹，为每个工具生成工具得分。 基于计算设备中的工具得分来识别至少具有所选择的工具的故障状况。