公开(公告)号：US10886287B2

公开(公告)日：2021-01-05

申请号：US16246639

申请日：2019-01-14

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Xuan Anh Tran ,  Sunil Kumar Singh ,  Shyue Seng Tan

IPC: H01L27/11521 ,  H01L29/788 ,  H01L29/78 ,  H01L21/306 ,  H01L29/66 ,  H01L21/308 ,  H01L29/423

Abstract: One illustrative MPT device disclosed herein includes an active region and an inactive region, isolation material positioned between the active region and the inactive region, the isolation material electrically isolating the active region from the inactive region, and an FG MTP cell formed in the active region. In this example, the FG MTP cell includes a floating gate, wherein first, second and third portions of the floating gate are positioned above the active region, the inactive region and the isolation material, respectively, and a control gate positioned above at least a portion of the inactive region, wherein the control gate is positioned above an upper surface and adjacent opposing sidewall surfaces of at least a part of the second portion of the floating gate.

公开(公告)号：US20200227424A1

公开(公告)日：2020-07-16

申请号：US16246639

申请日：2019-01-14

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Xuan Anh Tran ,  Sunil Kumar Singh ,  Shyue Seng Tan

IPC: H01L27/11521 ,  H01L29/788 ,  H01L29/78 ,  H01L29/423 ,  H01L21/306 ,  H01L29/66 ,  H01L21/308

Abstract: One illustrative MPT device disclosed herein includes an active region and an inactive region, isolation material positioned between the active region and the inactive region, the isolation material electrically isolating the active region from the inactive region, and an FG MTP cell formed in the active region. In this example, the FG MTP cell includes a floating gate, wherein first, second and third portions of the floating gate are positioned above the active region, the inactive region and the isolation material, respectively, and a control gate positioned above at least a portion of the inactive region, wherein the control gate is positioned above an upper surface and adjacent opposing sidewall surfaces of at least a part of the second portion of the floating gate.