公开(公告)号：US11631759B2

公开(公告)日：2023-04-18

申请号：US17164855

申请日：2021-02-02

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Meng Miao ,  Alain François Loiseau ,  Souvick Mitra ,  Robert John Gauthier, Jr. ,  You Li ,  Wei Liang

IPC: H01L29/06 ,  H01L29/74 ,  H01L29/66

Abstract: An ESD protection device may be provided, including: a substrate including a first conductivity region and a second conductivity region arranged therein. The first conductivity region may include a first terminal region and a second terminal region electrically coupled with each other. The second conductivity region may include a third terminal region and a fourth terminal region electrically coupled with each other. The second conductivity region may further include a fifth terminal region electrically coupled with the first and second terminal regions. The fifth terminal region may be arranged laterally between the third terminal region and the fourth terminal region. The first conductivity region, the first terminal region, the third terminal region, and the fifth terminal region may have a first conductivity type. The second conductivity region, the second terminal region, and the fourth terminal region may have a second conductivity type different from the first conductivity type.