公开(公告)号：US20220057576A1

公开(公告)日：2022-02-24

申请号：US17454063

申请日：2021-11-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： YUSHENG BIAN ,  BO PENG ,  MICHAL RAKOWSKI

IPC: G02B6/122

Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to semiconductor devices having a reflector and a photonic component and a method of forming the same. The present disclosure provides a semiconductor device having a substrate, a photonic component arranged above the substrate, a bottom reflector arranged above the substrate and positioned below the photonic component, in which the bottom reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component, and a top reflector arranged above the photonic component, in which the top reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component.

公开(公告)号：US20210286130A1

公开(公告)日：2021-09-16

申请号：US16817582

申请日：2020-03-12

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： YUSHENG BIAN ,  BO PENG ,  MICHAL RAKOWSKI

IPC: G02B6/122

Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to semiconductor devices having a reflector and a photonic component and a method of forming the same. The present disclosure provides a semiconductor device having a substrate, a photonic component arranged above the substrate, a bottom reflector arranged above the substrate and positioned below the photonic component, in which the bottom reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component, and a top reflector arranged above the photonic component, in which the top reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component.