RAPID ACTIVE VIBRATION REDUCTION METHOD FOR HIGH-SPEED MOTION STAGE

    公开(公告)号:US20230235810A1

    公开(公告)日:2023-07-27

    申请号:US18154533

    申请日:2023-01-13

    IPC分类号: F16F15/00 F16F15/02

    摘要: A rapid active vibration reduction method for a high-speed motion stage includes acquiring motion parameters of a motion body of the motion stage in current motion; determining a vibration reduction mode of a vibration reduction device according to the motion parameters; and controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated. Realizing vibration reduction by means of active friction can reduce vibration of the motion body in a specific stage needing vibration reduction, and the action end of the vibration reduction device does not need to contact with the motion body or does not need to contact with the driving device before vibration reduction.