公开(公告)号：US20150179986A1

公开(公告)日：2015-06-25

申请号：US14614020

申请日：2015-02-04

Applicant: General Electric Company

Inventor： Min Yan ,  Larry Turner ,  Ahmet Gun Erlat ,  David J. Smith ,  William Francis Monaghan

IPC: H01L51/56 ,  H01L51/00

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/562 ,  H01L51/0021 ,  H01L51/5092 ,  H01L51/5221

Abstract: An apparatus for applying a patterned coating to an OLED substrate in a continuous roll-to-roll vapor based deposition process is provided comprising a vapor deposition source, a processing drum, a drive roller, and a shadow mask wherein the shadow mask comprises a mask line feature that selectively prevents deposition of the coating onto the substrate. Also presented is a method for applying the coating.

Abstract translation: 提供了一种用于以连续的辊对辊蒸气为基础的沉积工艺将图案化涂层施加到OLED基底的装置，其包括气相沉积源，处理鼓，驱动辊和荫罩，其中荫罩包括掩模 线性特征，其选择性地防止涂层沉积到基底上。 还提出了施加涂层的方法。