公开(公告)号：US11659646B2

公开(公告)日：2023-05-23

申请号：US17493407

申请日：2021-10-04

申请人： Gigaphoton Inc.

发明人： Koji Yamasaki ,  Fumio Iwamoto

IPC分类号： H05G2/00

CPC分类号： H05G2/006 ,  H05G2/008

摘要： A target supply device may include a tank configured to store a target substance, a pressure adjuster configured to adjust a pressure in the tank, a filter configured to filter the target substance in the tank, a nozzle configured to output a droplet of the target substance having passed through the filter, a droplet detector configured to detect outputting of the droplet from the nozzle, and a processor configured to control the pressure adjuster so that a pressure-increasing speed of the pressure in the tank is higher after detection of outputting of the droplet than before detection of outputting of the droplet, during a period in which the pressure in the tank is increased to a target pressure from a pressure at which outputting of the droplet is detected by the droplet detector for the first time after installation of the target supply device.