公开(公告)号：US20240248416A1

公开(公告)日：2024-07-25

申请号：US18537898

申请日：2023-12-13

Applicant: Gigaphoton Inc.

Inventor： Takuya ISHII ,  Yuto TANAKA ,  Shinichi HAGIWARA

IPC: G03F7/00

CPC classification number: G03F7/70725

Abstract: A tilt stage includes a mounting table on which a target supply device supplying a target to a predetermined region in a chamber is mounted, a rotation support portion supporting the mounting table rotatably about at least first and second axes, a first tilt support portion including a first ball and a first contact surface in contact with the first ball and supporting the mounting table, a first adjuster adjusting posture of the target supply device by moving one of the first ball and the first contact surface in a first direction, a second tilt support portion including a second ball and a second contact surface in contact with the first ball and supporting the mounting table, and a second adjuster adjusting the posture of the target supply device by moving one of the second ball and the second contact surface in a second direction.