公开(公告)号：US08927951B2

公开(公告)日：2015-01-06

申请号：US14084558

申请日：2013-11-19

Applicant: Gigaphoton Inc.

Inventor： Hiroshi Umeda ,  Takashi Ohara ,  Osamu Wakabayashi

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: A target supply device may include a tank having a nozzle, a first electrode provided with a first through-hole, a second electrode provided with a second through-hole, a third electrode disposed within the tank, an anchoring portion configured to anchor the first electrode and the second electrode to the tank so that insulation among the nozzle, the first electrode, and the second electrode is maintained, and so that a center axis of the nozzle is positioned within the first through-hole and the second through-hole, a first projecting portion that is an integrated part of at least one of the first electrode and the second electrode and that is configured to project toward the nozzle, and a second projecting portion that is an integrated part of at least the second electrode and that is configured to project so as to be positioned between the first electrode and the second electrode.

Abstract translation: 目标供给装置可以包括具有喷嘴的罐，设置有第一通孔的第一电极，设置有第二通孔的第二电极，设置在罐内的第三电极，锚定部分， 电极和第二电极连接到罐，使得保持喷嘴，第一电极和第二电极之间的绝缘，并且使得喷嘴的中心轴线位于第一通孔和第二通孔内， 第一突出部，其是第一电极和第二电极中的至少一个的一体部分，并且被构造成朝向喷嘴突出;第二突出部，其是至少第二电极的一体部分， 被配置成突出以便定位在第一电极和第二电极之间。