公开(公告)号：US20090015269A1

公开(公告)日：2009-01-15

申请号：US12169796

申请日：2008-07-09

申请人： Gino A. Pinto ,  Justin M. Piccirillo ,  Michael J. Amirto ,  Kevin M. Bourbeau

发明人： Gino A. Pinto ,  Justin M. Piccirillo ,  Michael J. Amirto ,  Kevin M. Bourbeau

IPC分类号： G01R27/26 ,  G01L9/12

CPC分类号： G01L9/0072

摘要： A capacitive sensor (10) producing an output signal (VOUT) that is insensitive to stray capacitance (CS) caused by environmental and aging conditions. The sensor includes a sensing electrode (11) that exhibits a total capacitance that is responsive to both the measured process variable and to stray capacitance (CT=CA+CS). The sensor also includes a reference electrode (19) that exhibits a stray capacitance (CS′) essentially the same as that of the sensing electrode, but that is insensitive to the process variable. Balancing circuitry (29) provides an output signal that is responsive to the measured process variable and insensitive to the stray capacitance (VOUT=CT−CS′). The reference electrode is manufactured of the same materials and dimensions as the sensing electrode and may be mounted in the sensor body proximate the sensing electrode.

摘要翻译： 产生由环境和老化条件引起的对杂散电容（CS）不敏感的输出信号（VOUT）的电容传感器（10）。 传感器包括感测电极（11），其具有响应于测量的过程变量和杂散电容（CT = CA + CS）的总电容。 该传感器还包括参考电极（19），其具有与感测电极基本相同的寄生电容（CS'），但对过程变量不敏感。 平衡电路（29）提供响应于测量的过程变量并且对杂散电容（VOUT = CT-CS'）不敏感的输出信号。 参考电极由与感测电极相同的材料和尺寸制造，并且可以安装在靠近感测电极的传感器体中。

公开(公告)号：US08893555B2

公开(公告)日：2014-11-25

申请号：US13491842

申请日：2012-06-08

申请人： Kevin M. Bourbeau ,  Eric C. Beishline ,  Michael J. Amirto ,  Gino A. Pinto ,  Benjamin F. Fontaine

发明人： Kevin M. Bourbeau ,  Eric C. Beishline ,  Michael J. Amirto ,  Gino A. Pinto ,  Benjamin F. Fontaine

IPC分类号： G01L9/00 ,  G01L19/04

CPC分类号： G01L19/04 ,  G01L9/0072

摘要： A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.

摘要翻译： 用作真空压力计的压力传感器（40）。 传感器的参考压力腔（50）通过位于传感器电极（52）的板部分（54）后面的抽气开口（72），该抽气开口具有用于在超压期间支撑膜片（44）的非平面表面 事件。 电极通过钎焊接头与传感器的主体（42）气密密封，陶瓷密封件（60）设置在其间。 钎焊接头可以包括缓冲材料层（79），该层向接头提供一定程度的延展性，以避免陶瓷密封构件的开裂。 钎焊的陶瓷/金属接头允许选择材料，使得不同的热膨胀效应可被动地最小化。 电极通过具有弹簧部分（53）的导线连接到传感器电路（84），从而提供无应力的互连。

公开(公告)号：US20130055820A1

公开(公告)日：2013-03-07

申请号：US13491842

申请日：2012-06-08

申请人： Kevin M. Bourbeau ,  Eric C. Beishline ,  Michael J. Amirto ,  Gino A. Pinto ,  Benjamin F. Fontaine

发明人： Kevin M. Bourbeau ,  Eric C. Beishline ,  Michael J. Amirto ,  Gino A. Pinto ,  Benjamin F. Fontaine

IPC分类号： G01L9/00

CPC分类号： G01L19/04 ,  G01L9/0072

摘要： A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.

摘要翻译： 用作真空压力计的压力传感器（40）。 传感器的参考压力腔（50）通过位于传感器电极（52）的板部分（54）后面的抽空开口（72），该抽气开口具有用于在超压期间支撑膜片（44）的非平面表面 事件。 电极通过钎焊接头与传感器的主体（42）气密密封，陶瓷密封件（60）设置在其间。 钎焊接头可以包括缓冲材料层（79），该层向接头提供一定程度的延展性，以避免陶瓷密封构件的开裂。 钎焊的陶瓷/金属接头允许选择材料，使得不同的热膨胀效应可被动地最小化。 电极通过具有弹簧部分（53）的导线连接到传感器电路（84），从而提供无应力的互连。