公开(公告)号：US20090152108A1

公开(公告)日：2009-06-18

申请号：US12281310

申请日：2007-02-14

申请人： Grit Huttl ,  Folke Steinert ,  Joachim Wagner

发明人： Grit Huttl ,  Folke Steinert ,  Joachim Wagner

IPC分类号： C23C14/34 ,  B23K1/00 ,  B32B1/08

CPC分类号： C23C14/3407 ,  H01J37/3423 ,  H01J37/3435 ,  H01J37/3491 ,  Y10T428/1317

摘要： The invention relates to a target arrangement comprising a tubular-shaped carrier element and a hollow-cylindrical target having at least one target material, said target comprising at least one one-piece tube segment which at least partially surrounds the carrier element. Said carrier element and the tube segment are partially interconnected in a material fit by at least two plastically deformable compensating means. The invention also relates to a method for producing said type of target arrangement and a tubular segment.

摘要翻译： 本发明涉及一种目标装置，其包括管状载体元件和具有至少一种靶材料的中空圆柱形靶材，所述靶材包括至少部分围绕载体元件的至少一个整体管段。 所述载体元件和管段通过由至少两个可塑性变形补偿装置配合的材料部分互连。 本发明还涉及一种用于生产所述类型的目标装置和管状部分的方法。