公开(公告)号：US08633430B2

公开(公告)日：2014-01-21

申请号：US13435628

申请日：2012-03-30

申请人： Gunter Möhler ,  Dietmar Schmidt ,  Oliver Holub

发明人： Gunter Möhler ,  Dietmar Schmidt ,  Oliver Holub

IPC分类号： H01L27/00

CPC分类号： G02B21/008 ,  G01J1/20 ,  G01J1/42

摘要： Method and apparatus for generating an at least two-dimensional image of at least part of a sample. The method involves scanning the sample. Acquiring at least one light signal by an optoelectronic detector for different areas of the sample. Converting the light signal into an electrical signal. Distributing the electrical signal onto several parallel evaluation channels whose signal evaluations differ from each other so that their dynamic ranges are different. Generating a result signal in each evaluation channel. Selecting at least one of the result signals as a function of one of the result signals in order to generate the image for the sample range concerned. It is also possible to generate one intermediate result signal for each channel, typically from the respective actual result signal and one or more other sources. Thus the signal selection depending on both the result signals and the intermediate result signals are possible.

摘要翻译： 用于产生至少部分样品的至少二维图像的方法和装置。 该方法涉及扫描样品。 通过光电检测器获取至少一个光信号，以获得样品的不同区域。 将光信号转换为电信号。 将电信号分配到信号评估彼此不同的几个并行评估通道上，使得它们的动态范围不同。 在每个评估通道中生成结果信号。 选择结果信号中的至少一个作为结果信号之一的函数，以便生成所关注的样本范围的图像。 通常也可以从相应的实际结果信号和一个或多个其他源产生每个信道的一个中间结果信号。 因此，取决于结果信号和中间结果信号的信号选择是可能的。

公开(公告)号：US20120205519A1

公开(公告)日：2012-08-16

申请号：US13435628

申请日：2012-03-30

申请人： Gunter Möhler ,  Dietmar Schmidt ,  Oliver Holub

发明人： Gunter Möhler ,  Dietmar Schmidt ,  Oliver Holub

IPC分类号： G01J1/44

CPC分类号： G02B21/008 ,  G01J1/20 ,  G01J1/42

摘要： Method and apparatus for generating an at least two-dimensional image of at least part of a sample. The method involves scanning the sample. Acquiring at least one light signal by an optoelectronic detector for different areas of the sample. Converting the light signal into an electrical signal. Distributing the electrical signal onto several parallel evaluation channels whose signal evaluations differ from each other so that their dynamic ranges are different. Generating a result signal in each evaluation channel. Selecting at least one of the result signals as a function of one of the result signals in order to generate the image for the sample range concerned. It is also possible to generate one intermediate result signal for each channel, typically from the respective actual result signal and one or more other sources. Thus the signal selection depending on both the result signals and the intermediate result signals are possible.

摘要翻译： 用于产生至少部分样品的至少二维图像的方法和装置。 该方法涉及扫描样品。 通过光电检测器获取至少一个光信号，以获得样品的不同区域。 将光信号转换为电信号。 将电信号分配到信号评估彼此不同的几个并行评估通道上，使得它们的动态范围不同。 在每个评估通道中生成结果信号。 选择结果信号中的至少一个作为结果信号之一的函数，以便生成所关注的样本范围的图像。 通常也可以从相应的实际结果信号和一个或多个其他源产生每个信道的一个中间结果信号。 因此，取决于结果信号和中间结果信号的信号选择是可能的。