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公开(公告)号:US20210221627A1
公开(公告)日:2021-07-22
申请号:US16307791
申请日:2017-08-07
发明人: Song LU , Jin WANG , Feng CAO , Chengquan ZHOU , Zhengfeng LIU , Zekai XIE , Jiaming YOU , Bing DING , Yunfeng GAO
摘要: A non-contact transporting apparatus (10) includes: a negative pressure assembly (100) configured to generate a negative pressure airflow within the non-contact transporting apparatus; and an ultrasonic assembly (200) connected to the negative pressure assembly (100). The ultrasonic assembly (200) includes: an ultrasonic transducer (210) configured to convert a high-frequency ultrasonic electrical signal into a high-frequency mechanical vibration, one end of the ultrasonic transducer (210) is connected to the negative pressure assembly (100); an ultrasonic horn (230) configured to amplify the high-frequency mechanical vibration, one end of the ultrasonic horn (230) is connected to one end of the ultrasonic transducer (210) away from the negative pressure assembly (100); and an ultrasonic chuck (250) configured to amplify and convert the high-frequency mechanical vibration, the ultrasonic chuck (250) is connected to one end of the ultrasonic horn (230) away from the ultrasonic transducer (210).