公开(公告)号：US20160334203A1

公开(公告)日：2016-11-17

申请号：US15112179

申请日：2014-12-25

申请人： HARBIN INSTITUTE OF TECHNOLOGY

发明人： JIWEN CUI ,  KUNPENG FENG ,  JUNYING LI ,  JIUBIN TAN

IPC分类号： G01B11/00 ,  G01D5/353 ,  G01B5/012

CPC分类号： G01B11/007 ,  G01B5/012 ,  G01B11/18 ,  G01D5/35316 ,  G01D5/3538

摘要： A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

摘要翻译： 提供了一种用于测量微型部件结构的多芯光纤布拉格光栅（FBG）探头的方法和设备。 所提供的方法涉及如何通过将二维或三维接触位移转换为多芯FBG探针的频谱偏移来实现微型部件的测量结构，并重建微型部件的结构几何形状。 所提供的设备可用于使多芯FBG探针的球形尖端与微型部件接触，以确定接触点的坐标，并重建微型部件的结构几何形状。 提供的方法和设备具有灵敏度高，探测力低，检测宽高比和对环境干扰的抵抗能力。