公开(公告)号：US20040212026A1

公开(公告)日：2004-10-28

申请号：US10848961

申请日：2004-05-18

Applicant: HEWLETT-PACKARD COMPANY

Inventor： Andrew L. Van Brocklin ,  Eric T. Martin ,  Stanley J. Wang ,  Adam L. Ghozeil

IPC: H01L029/06

CPC classification number: G11C17/00 ,  G02B26/001 ,  G11C5/025

Abstract: Devices and methods for controlling a MEMS actuator are disclosed. The device includes a pair of parallel plates having a gap therebetween. The size of the gap is responsive to a voltage differential between the pair of plates. The device also includes a controller adapted to apply a voltage profile to at least one of the pair of plates to maintain a desired gap size. The voltage profile has a time-varying voltage.

Abstract translation: 公开了用于控制MEMS致动器的装置和方法。 该装置包括一对在它们之间具有间隙的平行板。 间隙的大小响应于该对板之间的电压差。 该装置还包括适于将电压分布施加到该对板中的至少一个板的控制器，以保持期望的间隙尺寸。 电压曲线具有时变电压。