公开(公告)号：US20190234992A1

公开(公告)日：2019-08-01

申请号：US16257226

申请日：2019-01-25

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masayuki IWASA ,  Yoshiteru Shikakura ,  Shinya Kudo ,  Toshihiro Ueno

IPC: G01Q20/02 ,  G01Q30/06 ,  G01Q60/36 ,  G06T5/50 ,  G06T7/12

Abstract: Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.