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公开(公告)号：US20190287693A1
公开(公告)日：2019-09-19
申请号：US16348340
申请日：2017-11-02
Applicant: HITACHI ZOSEN CORPORATION
Inventor： Hiroyuki DAIKU , Ichiro SAKAI , Norihiro INOUE , Yohei TERASAKA
Abstract: Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.
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