公开(公告)号：US11902742B2

公开(公告)日：2024-02-13

申请号：US17681285

申请日：2022-02-25

Applicant: HUAWEI TECHNOLOGIES CO., LTD.

Inventor： Dongming Fang ,  Ming Li

IPC: H04R23/00 ,  G01H9/00 ,  G02F1/125

CPC classification number: H04R23/008 ,  G01H9/004 ,  G02F1/125 ,  H04R2410/03

Abstract: The disclosure provides a microphone chip, a microphone, and a terminal device. The microphone chip includes a substrate and a diaphragm that are disposed oppositely, a reflector located on a side that is of the diaphragm and that is close to the substrate, a grating group located between the substrate and the diaphragm, and an optical emitter and an optical detector that are located between the substrate and the grating group. The grating group includes a plurality of gratings, and distances between at least two gratings in the plurality of gratings and the reflector are different.