专利检索 ap:("Heraeus Conamic North America LLC") AND inv:"Michael WEISSMAYER" 第 1 页

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发明申请
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS 有权

公开(公告)号：US20220204410A1

公开(公告)日：2022-06-30

申请号：US17593956

申请日：2020-04-04

申请人： Heraeus Conamic North America LLC

发明人： Matthew Joseph DONELON , Saurav BISTA , Saurabh WAGHMARE , Chase DAVIS , Michael WEISSMAYER , Felix FRANZ

IPC分类号： C04B35/505

摘要： A sintered yttrium oxide body having a total impurity level of 40 ppm or less, a density of not less than 4.93 g/cm3, wherein the sintered yttrium oxide body has at least one surface comprising at least one pore, wherein no pore is larger than 5 μm in diameter. A process for making the sintered yttrium oxide body is also disclosed.