摘要:
A method for cleaning a glass substrate containing SiO2 as a main ingredient thereof ensuring removal of abrasive and foreign matter adhered to the glass substrate after a polishing step, without complicating a cleaning step, including a process in which the glass substrate is cleaned by scrubbing using a liquid having Si element stationary in a range from 1 to 5 000 ppb/mm2.
摘要翻译:一种用于清洗含有SiO 2的玻璃基板作为主要成分的方法,其确保在抛光步骤之后除去粘附到玻璃基板上的磨料和异物,而不会使清洁步骤复杂化,包括其中 通过使用具有1至5 000ppb / mm 2范围内的Si元素静止的液体进行擦洗来清洁玻璃基板。
摘要:
A method for cleaning a glass substrate which ensures removal of abrasive and other foreign matter without making a cleaning step complicated involves cleaning the glass substrate by scrubbing using two or more types of cleaning liquid having different Si element elution abilities. The cleaning liquid having the highest Si element elution is used first, and the cleaning liquid having the lowest Si element elution is used last.
摘要:
A method for fabricating a glass substrate for an information recording medium ensures removal of an abrasive or foreign mater adhered to the glass substrate after a polishing step, and involves, after the polishing step, keeping the surface of the glass substrate in contact with a liquid for 10 minutes or more before a scrub-cleaning step. To ensure that the abrasive or foreign matter firmly adhered to the glass substrate is removed by scrub-cleaning, preferably, the surface of the glass substrate is kept in contact with the liquid with the glass substrate immersed in the liquid which is collected.
摘要:
A method for fabricating a glass substrate containing SiO2 as a main ingredient thereof for an information recording medium which ensures removal of abrasive or foreign mater adhered to the glass substrate without complicating a cleaning step, involves, after a polishing step, keeping the surface of the glass substrate in contact with a liquid having a Si element elution in a range from 100 to 10 000 ppb/mm2 before a scrub-cleaning step.
摘要翻译:一种制造含有SiO 2作为其主要成分的玻璃基板的方法,用于信息记录介质,其确保去除附着在玻璃基板上的磨料或外来物而不使清洗步骤复杂化,包括在抛光步骤之后,保持表面 玻璃基板在洗涤步骤之前与具有100至10000ppb / mm 2范围内的Si元素洗脱的液体接触。
摘要:
A method for cleaning a glass substrate which ensures removal of abrasive and other foreign matter without making a cleaning step complicated involves cleaning the glass substrate by scrubbing using two or more types of cleaning liquid having different Si element elution abilities. The cleaning liquid having the highest Si element elution is used first, and the cleaning liquid having the lowest Si element elution is used last.
摘要:
A method for fabricating a glass substrate containing SiO2 as a main ingredient thereof for an information recording medium which ensures removal of abrasive or foreign mater adhered to the glass substrate without complicating a cleaning step, involves, after a polishing step, keeping the surface of the glass substrate in contact with a liquid having a Si element elution in a range from 100 to 10 000 ppb/mm2 before a scrub-cleaning step.
摘要翻译:用于制造含有SiO 2作为其主要成分的玻璃基板的方法,用于信息记录介质,其确保去除附着到玻璃基板上的磨料或外来物而不使清洁步骤复杂化,包括在 抛光步骤,在擦洗步骤之前,保持玻璃基板的表面与具有Si元素洗脱的液体在100至10000ppb / mm 2的范围内接触。