公开(公告)号：US06438458B1

公开(公告)日：2002-08-20

申请号：US09493230

申请日：2000-01-28

申请人： Hiroshi Shimoike ,  Takashi Nakahara

发明人： Hiroshi Shimoike ,  Takashi Nakahara

IPC分类号： G05B1904

摘要： A substrate conveying system wherein, at a substrate transfer position of a conveyance robot, a robot arm is moved upwardly at a normal speed from its lowermost position, and wherein the movement speed is changed to a lower speed at a predetermined position. During upward motion at the lower speed, the substrate is received and, while continuing the upward motion, the movement speed is changed back to the normal speed, at a second predetermined position. The robot arm continues its upward motion to its topmost position, with this normal speed.