Method of fabricating alignment film of liquid crystal display and etching apparatus used therein
    1.
    发明申请
    Method of fabricating alignment film of liquid crystal display and etching apparatus used therein 审中-公开
    制造液晶显示器取向膜的方法及其中使用的蚀刻装置

    公开(公告)号:US20060197899A1

    公开(公告)日:2006-09-07

    申请号:US11319088

    申请日:2005-12-27

    IPC分类号: G02F1/1337

    摘要: Provided are a method of fabricating an alignment film of a liquid crystal display device, which is capable of simply patterning the alignment film at an accurate location and an etching apparatus used therein. The method includes forming an alignment film on a substrate having an electrode pad at a position corresponding to a transfer electrode for applying a voltage to a common electrode, and locally etching the alignment film to expose the electrode pad without using a mask pattern.

    摘要翻译: 提供了一种制造液晶显示装置的取向膜的方法,其能够简单地在精确位置上对取向膜进行图案化和其中使用的蚀刻装置。 该方法包括在具有电极焊盘的基板上形成取向膜,该电极焊盘位于对应于用于向公共电极施加电压的转印电极的位置处,并且局部蚀刻取向膜以暴露电极焊盘而不使用掩模图案。