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1.发明申请EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, CLEANING APPARATUS, CLEANING METHOD, AND EXPOSURE METHOD 审中-公开曝光装置，装置生产方法，清洁装置，清洁方法和曝光方法公开(公告)号：US20120204913A1
公开(公告)日：2012-08-16
申请号：US13454212
申请日：2012-04-24
申请人： Hiroyuki NAGASAKA , Yasushi YODA
发明人： Hiroyuki NAGASAKA , Yasushi YODA
CPC分类号： G03F7/70925 , G03F7/70341 , G03F7/70716
摘要： An exposure apparatus exposes a substrate with an exposure light through an exposure liquid. The exposure apparatus includes an optical element from which the exposure light exits; a stage which is movable on the light-exit side of the optical element; a certain member which is provided on the stage; and a vibration generator which vibrates the certain member to apply vibration to the liquid in the liquid immersion space formed on the certain member. It is possible to suppress the deterioration of the performance which would be otherwise caused by any contamination.
摘要翻译： 曝光装置通过曝光液体曝光具有曝光光的基板。 曝光装置包括曝光光从该光学元件出射的光学元件; 可在光学元件的光出射侧移动的台; 在舞台上设置的某个会员; 以及振动发生器，其振动所述某些构件以对形成在所述特定构件上的液浸空间中的液体施加振动。 可以抑制否则由任何污染引起的性能的劣化。
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公开(公告)号：US20150061452A1
公开(公告)日：2015-03-05
申请号：US14466352
申请日：2014-08-22
申请人： Kouji NAKATAKE , Yasushi YODA , Masaaki OHASHI
发明人： Kouji NAKATAKE , Yasushi YODA , Masaaki OHASHI
CPC分类号： H02K3/487 , H02K3/325 , H02K3/522 , H02K2203/12
摘要： A coil is wound via an electrically insulating member within a slot of a stator core of an electromagnetic motor which is formed of a stator and a rotor. Groove portions are formed to oppose one another in respective opposing portions of a slot opening portion side of the electrically insulating member. An electrically insulating sheet is disposed by being inserted into the pair of groove portions.
摘要翻译： 线圈通过电绝缘构件缠绕在由定子和转子形成的电磁马达的定子芯的槽内。 沟槽部分形成为在电绝缘构件的槽开口部侧的相对的相对部分中彼此相对。 电绝缘片通过插入一对槽部而设置。
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