公开(公告)号：US20230343547A1

公开(公告)日：2023-10-26

申请号：US18013605

申请日：2020-07-16

Applicant: Hitachi High-Tech Corporation

Inventor： Miki AOYAGI ,  Masumi SHIRAI ,  Kei SAKAI

IPC: H01J37/22

CPC classification number: H01J37/222

Abstract: The purpose of the present disclosure is to provide a technology for calculating a machine difference correction coefficient more efficiently with high accuracy. A defect inspection device according to the present disclosure calculates a machine difference correction coefficient for correcting a difference in the feature amount of a reference sample between devices, and when a machine difference variation coefficient indicating the change over time in the feature amount of a calibration member is outside a threshold range, recalculates the machine difference correction coefficient by using the feature amount of the calibration member.