公开(公告)号：US10739260B2

公开(公告)日：2020-08-11

申请号：US15542447

申请日：2015-01-26

Applicant: Hitachi High-Technologies Corporation

Inventor： Takayuki Obara ,  Muneo Maeshima ,  Kazumichi Imai ,  Yohei Hanazaki

IPC: G01N21/552 ,  G01N1/38

Abstract: This optical analyzing device is provided with a light source, a detector, a substrate having a metal film on at least one surface thereof, and an optical element for introducing a light beam from the light source to the substrate and delivering the light beam from the substrate toward the detector. A plurality of sample regions for holding samples are provided on the metal film; and a portion of the light beam from the light source is irradiated to any one of the sample regions, is reflected, at least once, by the surface of the substrate on the opposite side of the side on which the sample regions are provided, and is not irradiated to a sample region other than the aforementioned sample region in the path thereof until the portion of the light beam is delivered by the optical element.