公开(公告)号：US20200256807A1

公开(公告)日：2020-08-13

申请号：US16642948

申请日：2017-09-11

Applicant: Hitachi High-Technologies Corporation

Inventor： Takanori KONDO ,  Toshifumi HONDA ,  Akira HAMAMATSU ,  Hideo OTA ,  Yoshio KIMOTO

IPC: G01N21/95 ,  G01N21/956

Abstract: The present invention addresses the problem of a film formation process in that a minute defect that an inspection before film formation (pre-inspection) has failed to detect becomes a larger film swelling due to film formation, and that, since the film swelling cannot be distinguished from an on-film defect, the film swelling is detected during an inspection after the film formation (post-inspection) as being an on-film defect that is on the film. In order to prevent the erroneous determination of the on-film defect, the sensitivity of the post-inspection has been reduced so that a film swelling due to a minute defect would not be detected. According to the present invention, classification is performed to determine whether a defect is at least one of an on-film defect and a film swelling, by performing a coordinate correction on the result of a post-inspection by means of an actual-defect fine alignment using the result of a pre-inspection performed with two-stage thresholds, and by checking defects against each other. In addition, classification is performed to determine whether a defect is at least one of an on-film defect and a film swelling by, during the post-inspection, preparing instruction data from information of the refractive index and thickness of a film formed on a wafer and comparing the instruction data with a signal intensity ratio of a detection system.

公开(公告)号：US20180088055A1

公开(公告)日：2018-03-29

申请号：US15569503

申请日：2015-05-26

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshio KIMOTO ,  Akira HAMAMATSU

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/47

CPC classification number: G01N21/8806 ,  G01N21/47 ,  G01N21/9501 ,  G01N2021/4792 ,  G01N2021/8848

Abstract: Proposed is an inspection device that is provided with: an illuminating optical unit that irradiates a discretionary region of a sample with light; a control unit that gives instructions to the illuminating optical unit; and at least one detection unit that detects light transmitted from the sample. The illuminating optical unit includes a light source unit that generates light, and an electrooptic element unit to which the light generated by the light source unit is inputted, and on the basis of the instructions given from the control unit, the electrooptic element unit adjusts the light to be in a desired polarization state, said light having been generated by the light source unit, and irradiates the sample with the light.