公开(公告)号：US20200035450A1

公开(公告)日：2020-01-30

申请号：US16509694

申请日：2019-07-12

Applicant: Hitachi High-Technologies Corporation

Inventor： Shunsuke MIZUTANI ,  Yuuji KASAI ,  Minoru YAMAZAKI ,  Makoto SUZUKI

IPC: H01J37/28 ,  H01J37/145 ,  H01J37/244 ,  H01J37/06

Abstract: The present disclosure is to provide a charged particle beam device capable of achieving both high resolution by setting of a short WD and improvement of detection efficiency when setting a long WD. According to an aspect for achieving the above-described object, there is suggested a charged particle beam device including: an objective lens for converging a charged particle beam emitted from a charged particle source; a sample stage having a first driving mechanism for moving a sample to be irradiated with the charged particle beam between a first position and a second position more separated from the objective lens than the first position; a detection surface for detecting charged particles emitted from the sample; and a second driving mechanism for moving the detection surface between within a movable range of the sample between the first position and the second position and out of the movable range of the sample.