公开(公告)号：US11662294B2

公开(公告)日：2023-05-30

申请号：US17254673

申请日：2020-04-15

Applicant: Hitachi Industrial Equipment Systems Co., Ltd.

Inventor： Takeshi Kaneko ,  Hirotoshi Sato ,  Toshihiko Suwa ,  Makoto Yokoyama ,  Haruhiko Adachi ,  Takeshi Matsumura

IPC: G01N15/08 ,  F24F7/00 ,  F24F13/28

CPC classification number: G01N15/082 ,  G01N15/0806 ,  G01N2015/084

Abstract: Provided is a fan filter unit with which the performance of a HEPA filter can be measured at multiple points with ease and in a short time. The fan filter unit has a first HEPA filter, a second HEPA filter, and exhaust means installed between the first HEPA filter and the second HEPA filter. The first HEPA filter, the second HEPA filter, and the exhaust means are integrated by a housing.