摘要:
An etching apparatus of a glass substrate for a flat panel display includes an etching chamber configured to receive a jig, glass substrates disposed on the jig, a holding member connected to the jig to hold the glass substrates, a transferring line connected to the jig to transfer the jig into the etching chamber, and a spray member which sprays an etchant onto surfaces of the glass substrates. A spray pressure of the etchant is equal to or greater than approximately 0.1 kg/cm2 and is less than approximately 0.5 kg/cm2.
摘要翻译:用于平板显示器的玻璃基板的蚀刻装置包括:被配置为容纳夹具的蚀刻室,设置在夹具上的玻璃基板,与夹具连接以保持玻璃基板的保持部件,连接到夹具的传送线 将夹具转移到蚀刻室中,以及将蚀刻剂喷射到玻璃基板的表面上的喷涂构件。 蚀刻剂的喷雾压力等于或大于约0.1kg / cm 2,并且小于约0.5kg / cm 2。