公开(公告)号：US20200370938A1

公开(公告)日：2020-11-26

申请号：US16992411

申请日：2020-08-13

申请人： Honeywell Internatinal Inc.

发明人： Robert Higashi ,  Scott Edward Beck ,  Yong-Fa Wang ,  Ian Bentley ,  Bill Hoover

IPC分类号： G01F1/688 ,  H01L27/16 ,  G01F1/684 ,  H01L35/14

摘要： Example systems, apparatuses, and methods are disclosed sensing a flow of fluid using a thermopile-based flow sensing device. An example apparatus includes a flow sensing device comprising a heating structure having a centerline. The flow sensing device may further comprise a thermopile. At least a portion of the thermopile may be disposed over the heating structure. The thermopile may comprise a first thermocouple having a first thermocouple junction disposed upstream of the centerline of the heating structure. The thermopile may further comprise a second thermocouple having a second thermocouple junction disposed downstream of the centerline of the heating structure.