Bayard-alpert vacuum gauge with neutralization of x-ray effect
    1.
    发明授权
    Bayard-alpert vacuum gauge with neutralization of x-ray effect 失效
    具有中和X射线效应的Bayard-alpert真空计

    公开(公告)号:US06257069B1

    公开(公告)日:2001-07-10

    申请号:US09194793

    申请日:1998-10-28

    IPC分类号: G01L900

    CPC分类号: G01L21/34 G01L21/32

    摘要: A Bayard-Alpert gas pressure measuring gauge with x-ray effect neutralization comprising collector and shield electrodes that comprise the same substantially inert electrically conductive substances. Said inert substance may be gold or another substance from the group consisting of platinum and rhodium, and mixtures thereof, and alloys comprising gold, platinum or rhodium; or said substance may be selected from the group consisting of the oxides of indium, chromium, vanadium and tin, mixtures thereof, and alloys comprising one of these. An electrical potential is applied to the shield that is more negative than the potential applied to the collector, said potential on the shield being in the range from about zero volts to about −50 volts when the collector is operated at a positive potential. Said negative potential with respect to the collector enhances the reverse x-ray effect for cancellation of the forward x-ray effect in the gauge. The gauge may also comprise a modified collector geometry to further enhance the reverse x-ray effect to achieve neutralization of the total x-ray effect. A method for neutralization of the x-ray effect by modulating the shield potential is also disclosed.

    摘要翻译: 具有x射线效应中和的Bayard-Alpert气体压力测量计包括收集器和屏蔽电极,其包含相同的基本惰性的导电物质。 所述惰性物质可以是金或来自铂和铑的其它物质及其混合物,以及包含金,铂或铑的合金; 或所述物质可以选自铟,铬,钒和锡的氧化物,其混合物和包含这些之一的合金。 电势被施加到比施加到集电极的电位更负的屏蔽上,当集电极处于正电位时,屏蔽上的电位在约零伏至约-50伏的范围内。 相对于收集器的所述负电位增强反向X射线效应以消除量规中的前X射线效应。 量规还可以包括改进的收集器几何形状,以进一步增强反向x射线效应以实现总X射线效应的中和。 还公开了通过调制屏蔽电位来中和x射线效应的方法。