Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
    1.
    发明授权
    Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method 有权
    检测方法和装置,光刻设备,光刻处理单元和器件制造方法

    公开(公告)号:US07916927B2

    公开(公告)日:2011-03-29

    申请号:US11653441

    申请日:2007-01-16

    IPC分类号: G06K9/00 G06K9/62

    CPC分类号: G03F7/70625

    摘要: Building of a model profile for a target is disclosed. An embodiment of the method includes importing an image of a known object and superimposing, on this image, either by hand or automatically, an estimated profile. The estimated profile is defined mathematically and adjusted segment by segment in order to match the image such that the adjusted estimated profile may be stored alongside a diffraction spectrum associated with the image. Alternatively or additionally, a user may trace (or free-draw) the profile of a known image and subsequently map a shape-definer of a mathematical function such as a polynomial equation, a spline or a vector onto the estimated profile in order to obtain a profile and one or more variables of that profile that may be used to reconstruct the profile of an unknown object from its diffraction pattern.

    摘要翻译: 披露了目标的模型配置文件的构建。 该方法的一个实施例包括导入已知对象的图像并且在该图像上手动或自动地叠加估计的轮廓。 估计轮廓被数学地定义并且逐段地调整,以便匹配图像,使得调整的估计轮廓可以与与图像相关联的衍射谱一起存储。 或者或另外,用户可以跟踪(或自由绘制)已知图像的轮廓,并且随后将诸如多项式方程,样条或矢量的数学函数的形状定义器映射到估计轮廓上,以获得 该轮廓的轮廓和一个或多个变量可用于从其衍射图案重建未知物体的轮廓。

    Inspection method and apparatus,lithographic apparatus, lithographic processing cell and device manufacturing method
    2.
    发明申请
    Inspection method and apparatus,lithographic apparatus, lithographic processing cell and device manufacturing method 有权
    检测方法和装置,光刻设备,光刻处理单元和器件制造方法

    公开(公告)号:US20080170780A1

    公开(公告)日:2008-07-17

    申请号:US11653441

    申请日:2007-01-16

    IPC分类号: G06K9/00

    CPC分类号: G03F7/70625

    摘要: Building of a model profile for a target is disclosed. An embodiment of the method includes importing an image of a known object and superimposing, on this image, either by hand or automatically, an estimated profile. The estimated profile is defined mathematically and adjusted segment by segment in order to match the image such that the adjusted estimated profile may be stored alongside a diffraction spectrum associated with the image. Alternatively or additionally, a user may trace (or free-draw) the profile of a known image and subsequently map a shape-definer of a mathematical function such as a polynomial equation, a spline or a vector onto the estimated profile in order to obtain a profile and one or more variables of that profile that may be used to reconstruct the profile of an unknown object from its diffraction pattern.

    摘要翻译: 披露了目标的模型配置文件的构建。 该方法的一个实施例包括导入已知对象的图像并且在该图像上手动或自动地叠加估计的轮廓。 估计轮廓被数学地定义并且逐段地调整,以便匹配图像,使得调整的估计轮廓可以与与图像相关联的衍射谱一起存储。 或者或另外,用户可以跟踪(或自由绘制)已知图像的轮廓,并且随后将诸如多项式方程,样条或矢量的数学函数的形状定义器映射到估计轮廓上,以获得 该轮廓的轮廓和一个或多个变量可用于从其衍射图案重建未知物体的轮廓。