公开(公告)号：US20060274305A1

公开(公告)日：2006-12-07

申请号：US11145873

申请日：2005-06-06

申请人： Hwan Jeong ,  Andrew Hill ,  Mark Wang

发明人： Hwan Jeong ,  Andrew Hill ,  Mark Wang

IPC分类号： G01N21/88

CPC分类号： G01N21/95623

摘要： Serrated Fourier filters and inspection systems are provided. One Fourier filter includes one or more blocking elements configured to block a portion of light from a wafer. The Fourier filter also includes periodic serrations formed on edges of the one or more blocking elements. The periodic serrations define a transition region of the one or more blocking elements. The periodic serrations are configured to vary transmission across the transition region such that variations in the transmission across the transition region are substantially smooth. One inspection system includes a Fourier filter configured as described above and a detector that is configured to detect light transmitted by the Fourier filter. Signals generated by the detector can be used to detect the defects on the wafer.

摘要翻译： 提供锯齿傅立叶滤波器和检测系统。 一个傅立叶滤波器包括被配置为阻挡来自晶片的一部分光的一个或多个阻挡元件。 傅立叶滤波器还包括形成在一个或多个阻挡元件的边缘上的周期性锯齿。 周期性锯齿限定了一个或多个阻挡元件的过渡区域。 周期性锯齿被配置为改变穿过过渡区域的传输，使得跨越过渡区域的透射率的变化基本上是平滑的。 一个检查系统包括如上所述构造的傅里叶滤波器和被配置为检测由傅里叶滤波器发送的光的检测器。 由检测器产生的信号可用于检测晶片上的缺陷。

公开(公告)号：US20060274432A1

公开(公告)日：2006-12-07

申请号：US11145829

申请日：2005-06-06

申请人： Hwan Jeong

发明人： Hwan Jeong

IPC分类号： G02B17/00

CPC分类号： G02B17/0804 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/0636 ,  G02B17/0852

摘要： Systems configured to provide illumination of a specimen during inspection are provided. One system includes catoptric elements configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The catoptric elements include positive and negative elements configured such that pupil distortions of the positive and negative elements are substantially canceled. Another system includes a dioptric element and a catoptric element. The dioptric element and the catoptric element are configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The dioptric and catoptric elements are also configured such that pupil distortions of the dioptric and catoptric elements are substantially canceled.

摘要翻译： 提供被配置为在检查期间提供样品的照明的系统。 一个系统包括反射元件，其被配置为将光从光源引导到以倾斜入射角穿过样本的线。 反射元件包括正和负元件，其被配置为使得正和负元件的光瞳畸变被基本上消除。 另一个系统包括一个折射元件和一个折射元件。 折射元件和反射元件被构造成将来自光源的光以倾斜的入射角引导到跨越样本的线。 折射和折射元件也被配置为使得屈光度和折射元件的瞳孔变形基本上被消除。