Gas sensor and manufacturing method thereof, and gas sensing system

    公开(公告)号:US20210293755A1

    公开(公告)日:2021-09-23

    申请号:US16825684

    申请日:2020-03-20

    申请人: I-Shou University

    IPC分类号: G01N29/02 G01N27/12

    摘要: A gas sensor comprises a basic part and a sensing layer deposited on the basic part. The basic part includes a circuit board and at least one surface acoustic wave element disposed on the circuit board. The sensing layer is a nanocomposite film of reduced graphene oxide/tungsten oxide/polypyrrole deposited on the surface acoustic wave element. The sensing layer combines reduced graphene oxide, metal oxide, and conductive polymer, so that the sensing layer is able to perform sensing at room temperature, and can be more sensitive. The present invention provides a method for manufacturing a gas sensor, and a gas sensing system including the gas sensor.