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公开(公告)号：US3517958A
公开(公告)日：1970-06-30
申请号：US3517958D
申请日：1968-06-17
Applicant: IBM
Inventor： BOUCHER PAUL D , MILLER JOSEPH C
IPC: B25B11/00 , H01L21/683 , B66C1/02
CPC classification number: B25B11/007 , H01L21/6838
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