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公开(公告)号:US3312871A
公开(公告)日:1967-04-04
申请号:US42058064
申请日:1964-12-23
Applicant: IBM
Inventor: HAJIME SEKI , SERAPHIM DONALD P
IPC: H01L23/535 , H01L27/118 , H01L49/02
CPC classification number: H01L23/535 , H01L27/118 , H01L49/02 , H01L2924/0002 , H01L2924/00