公开(公告)号：US11733462B2

公开(公告)日：2023-08-22

申请号：US17663135

申请日：2022-05-12

Applicant: II-VI Delaware, Inc.

Inventor： Chunyan Jia ,  Peng Xiao ,  Zhihua Song ,  Yingying Liu ,  Jin'E Hua

IPC: G02B6/35 ,  G02B6/26

CPC classification number: G02B6/3594 ,  G02B6/266 ,  G02B6/3596

Abstract: The present disclosure provides a MEMS-based variable optical attenuator (VOA) array, sequentially including an optical fiber array, a micro-lens array, and a MEMS-based micro-reflector array to form a VOA array having several optical attenuation units. The MEMS-based micro-reflectors can change the propagation direction of a beam, causing a misalignment coupling loss to the beam and thereby achieving optical attenuation, with a broad range of dynamic attenuation, low polarization dependent loss and wavelength dependent loss, good repeatability, short response time (at the millisecond level), etc. Arrayed device elements are used as assembly units of the present disclosure, and the assembly of arrayed elements facilitates tuning in batches. Accordingly, automation levels are improved, and the production costs are reduced.

公开(公告)号：US12158614B2

公开(公告)日：2024-12-03

申请号：US18344015

申请日：2023-06-29

Applicant: II-VI Delaware, Inc.

Inventor： Chunyan Jia ,  Peng Xiao ,  Zhihua Song ,  Yingying Liu ,  Jin'e Hua

IPC: G02B6/35 ,  G02B6/26

Abstract: The present disclosure provides a MEMS -based variable optical attenuator (VOA) array, sequentially including an optical fiber array, a micro-lens array, and a MEMS-based micro-reflector array to form a VOA array having several optical attenuation units. The MEMS-based micro-reflectors can change the propagation direction of a beam, causing a misalignment coupling loss to the beam and thereby achieving optical attenuation, with a broad range of dynamic attenuation, low polarization dependent loss and wavelength dependent loss, good repeatability, short response time (at the millisecond level), etc. Arrayed device elements are used as assembly units of the present disclosure, and the assembly of arrayed elements facilitates tuning in batches. Accordingly, automation levels are improved, and the production costs are reduced.

公开(公告)号：US20220269009A1

公开(公告)日：2022-08-25

申请号：US17663135

申请日：2022-05-12

Applicant: II-VI Delaware, Inc.

Inventor： Chunyan Jia ,  Peng Xiao ,  Zhihua Song ,  Yingying Liu ,  Jin'E Hua

IPC: G02B6/35 ,  G02B6/26

Abstract: The present disclosure provides a MEMS-based variable optical attenuator (VOA) array, sequentially including an optical fiber array, a micro-lens array, and a MEMS-based micro-reflector array to form a VOA array having several optical attenuation units. The MEMS-based micro-reflectors can change the propagation direction of a beam, causing a misalignment coupling loss to the beam and thereby achieving optical attenuation, with a broad range of dynamic attenuation, low polarization dependent loss and wavelength dependent loss, good repeatability, short response time (at the millisecond level), etc. Arrayed device elements are used as assembly units of the present disclosure, and the assembly of arrayed elements facilitates tuning in batches. Accordingly, automation levels are improved, and the production costs are reduced.

公开(公告)号：US20230341631A1

公开(公告)日：2023-10-26

申请号：US18344015

申请日：2023-06-29

Applicant: II-VI Delaware, Inc.

Inventor： Chunyan Jia ,  Peng Xiao ,  Zhihua Song ,  Yingying Liu ,  Jin'E Hua

IPC: G02B6/35 ,  G02B6/26

CPC classification number: G02B6/3594 ,  G02B6/266 ,  G02B6/3596

Abstract: The present disclosure provides a MEMS -based variable optical attenuator (VOA) array, sequentially including an optical fiber array, a micro-lens array, and a MEMS-based micro-reflector array to form a VOA array having several optical attenuation units. The MEMS-based micro-reflectors can change the propagation direction of a beam, causing a misalignment coupling loss to the beam and thereby achieving optical attenuation, with a broad range of dynamic attenuation, low polarization dependent loss and wavelength dependent loss, good repeatability, short response time (at the millisecond level), etc. Arrayed device elements are used as assembly units of the present disclosure, and the assembly of arrayed elements facilitates tuning in batches. Accordingly, automation levels are improved, and the production costs are reduced.

公开(公告)号：US11360273B2

公开(公告)日：2022-06-14

申请号：US17248223

申请日：2021-01-14

Applicant: II-VI Delaware, Inc.

Inventor： Chunyan Jia ,  Peng Xiao ,  Zhihua Song ,  Yingying Liu ,  Jin'E Hua

IPC: G02B6/35 ,  G02B6/26

Abstract: The present disclosure provides a MEMS-based variable optical attenuator (VOA) array, sequentially including an optical fiber array, a micro-lens array, and a MEMS-based micro-reflector array to form a VOA array having several optical attenuation units. The MEMS-based micro-reflectors can change the propagation direction of a beam, causing a misalignment coupling loss to the beam and thereby achieving optical attenuation, with a broad range of dynamic attenuation, low polarization dependent loss and wavelength dependent loss, good repeatability, short response time (at the millisecond level), etc. Arrayed device elements are used as assembly units of the present disclosure, and the assembly of arrayed elements facilitates tuning in batches. Accordingly, automation levels are improved, and the production costs are reduced.

公开(公告)号：US20210223479A1

公开(公告)日：2021-07-22

申请号：US17248223

申请日：2021-01-14

Applicant: II-VI Delaware, Inc.

Inventor： Chunyan JIA ,  Peng Xiao ,  Zhihua Song ,  Yingying Liu ,  Jin'e Hua

IPC: G02B6/35 ,  G02B6/26

Abstract: The present disclosure provides a MEMS-based variable optical attenuator (VOA) array, sequentially including an optical fiber array, a micro-lens array, and a MEMS-based micro-reflector array to form a VOA array having several optical attenuation units. The MEMS-based micro-reflectors can change the propagation direction of a beam, causing a misalignment coupling loss to the beam and thereby achieving optical attenuation, with a broad range of dynamic attenuation, low polarization dependent loss and wavelength dependent loss, good repeatability, short response time (at the millisecond level), etc. Arrayed device elements are used as assembly units of the present disclosure, and the assembly of arrayed elements facilitates tuning in batches. Accordingly, automation levels are improved, and the production costs are reduced.