公开(公告)号：US20230382756A1

公开(公告)日：2023-11-30

申请号：US18324791

申请日：2023-05-26

Applicant: IMEC VZW

Inventor： Michiel Jan Van Setten ,  Geoffrey Pourtois ,  Hendrik F.W. Dekkers ,  Gouri Sankar Kar

IPC: C01G9/03 ,  H01L29/786

CPC classification number: C01G9/03 ,  H01L29/78693 ,  C01P2002/02

Abstract: A mixed metal oxide and methods for making the mixed metal oxide are disclosed. The mixed metal oxide includes metal and metalloid elements including 0.40 to 0.70 parts by mole Mg, 0.30 to 0.60 parts by mole Zn, and 0.00 to 0.30 parts by mole of other elements selected from metals and metalloids, wherein less than 0.01 parts by mole of the other elements is Al, and wherein less than 0.04 parts by mole of the other elements is Ga. The sum of all parts by mole of Mg, Zn, and the other elements may amount to about 1.00. The mixed metal oxide additionally includes) oxygen and less than 0.01 parts by mole of non-metallic and non-metalloid impurities.