公开(公告)号：US20230382758A1

公开(公告)日：2023-11-30

申请号：US18325823

申请日：2023-05-30

申请人： IMEC VZW

发明人： Michiel Jan van Setten ,  Geoffrey Pourtois ,  Hendrik F.W. Dekkers ,  Gouri Sankar Kar

IPC分类号： C01G30/00 ,  H01L29/786

CPC分类号： C01G30/005 ,  H01L29/78693 ,  C01P2002/02

摘要： Mixed metal oxides and methods for making the mixed metal oxides are disclosed. A mixed metal oxide includes metal or metalloid elements including 0.50 to 0.90 parts by mole Mg, 0.05 to 0.30 parts by mole Al, 0.01 to 0.20 parts by mole Sb, and 0.00 to 0.31 parts by mole of other elements selected from metals and metalloids. The sum of all parts by mole of Mg, Al, Sb, and the other elements selected from metals and metalloids may amount to about 1.00. The mixed metal oxide additionally includes oxygen, and less than 0.01 parts by mole of non-metallic and non-metalloid impurities.

公开(公告)号：US20230010899A1

公开(公告)日：2023-01-12

申请号：US17810548

申请日：2022-07-01

申请人： IMEC VZW

发明人： Michiel Jan van Setten ,  Hendrik F.W Dekkers ,  Karl Opsomer ,  Geoffrey Pourtois ,  Gouri Sankar Kar

IPC分类号： H01L29/24 ,  C01G9/00 ,  C01G15/00 ,  H01L29/786 ,  H01L21/02

摘要： In an aspect, a mixed metal oxide comprises or consists essentially of: a mixture comprises or consisting essentially of 0.30 to 0.69 parts by mole Mg, 0.20 to 0.69 parts by mole Zn, 0.01 to 0.30 parts by mole of a third element selected from Al and Ga, and, either, when the third element is Al, 0.00 to 0.31 parts by mole of other elements selected from metals and metalloids, or, when the third element is Ga, 0.00 to 0.15 parts by mole of other elements selected from metals and metalloids, wherein the sum of all parts by mole of Mg, Zn, the third element, and the other elements amounts to 1.00, wherein the amount in parts by mole of the other elements is lower than the amount in parts by mole of Mg and is lower than the amount in parts by mole of Zn; oxygen; and less than 0.01 parts by mole of non-metallic and non-metalloid impurities.