公开(公告)号：US09983085B2

公开(公告)日：2018-05-29

申请号：US14917782

申请日：2013-09-09

申请人： INFICON GMBH

发明人： Martin Wüest ,  Christian Berg

IPC分类号： G01L27/00 ,  G01L21/02 ,  G01L9/00 ,  G01L13/02 ,  G01L21/00 ,  G01M99/00

CPC分类号： G01L21/02 ,  G01L9/0072 ,  G01L9/0075 ,  G01L13/025 ,  G01L21/00 ,  G01M99/00

摘要： Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3,5).

公开(公告)号：US10107703B2

公开(公告)日：2018-10-23

申请号：US14917886

申请日：2013-09-09

申请人： INFICON GMBH

发明人： Christian Berg ,  Martin Wüest

IPC分类号： G01L21/02 ,  G01L9/12 ,  G01L21/00 ,  G01N33/00

摘要： A pressure step is applied to the interior of a compartment. A sensor which measures the pressure within compartment, in response of the prevailing pressure level, and the transient step response oscillation frequency is used to identify the gas or gas mixture present in the compartment.