公开(公告)号：US09201007B2

公开(公告)日：2015-12-01

申请号：US13851879

申请日：2013-03-27

Applicant: Infineon Technologies AG

Inventor： Dieter Kohlert ,  Gerhard Poeppel ,  Franz Schreier

IPC: G01J3/00 ,  G01N21/61 ,  G01N21/3504 ,  G01N21/35

CPC classification number: G01N21/61 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/3595 ,  G01N2201/0636

Abstract: A device can be used for establishing gas concentrations in an examination volume. A radiation source is configured to generate an electromagnetic beam. A beam guiding apparatus is arranged downstream of the radiation source. The beam guiding apparatus is configured to set a plurality of variations of beam guidance of the beam entering the beam guiding apparatus in an observation plane in the examination volume. A spectrometer is arranged downstream of the beam guiding apparatus. The spectrometer is configured to carry out a spectral analysis of the beam leaving the beam guiding apparatus. An evaluation unit is configured to establish in the observation plane a 2D concentration distribution for one or more gases in the examination volume on the basis of the spectral analysis for different variations of beam guidance.

Abstract translation: 一种装置可用于建立检查体积中的气体浓度。 辐射源被配置为产生电磁波束。 光束引导装置布置在辐射源的下游。 光束引导装置被配置为在检查体积中的观察平面中设置进入光束引导装置的光束的多个波束引导变化。 光谱仪布置在光束引导装置的下游。 光谱仪被配置为对离开光束引导装置的光束进行光谱分析。 评估单元被配置为基于对波束引导的不同变化的频谱分析，在观察平面中建立检查体积中的一种或多种气体的2D浓度分布。

公开(公告)号：US20130258315A1

公开(公告)日：2013-10-03

申请号：US13851879

申请日：2013-03-27

Applicant: INFINEON TECHNOLOGIES AG

Inventor： Dieter Kohlert ,  Gerhard Poeppel ,  Franz Schreier

IPC: G01N21/61

CPC classification number: G01N21/61 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/3595 ,  G01N2201/0636

Abstract: A device can be used for establishing gas concentrations in an examination volume. A radiation source is configured to generate an electromagnetic beam. A beam guiding apparatus is arranged downstream of the radiation source. The beam guiding apparatus is configured to set a plurality of variations of beam guidance of the beam entering the beam guiding apparatus in an observation plane in the examination volume. A spectrometer is arranged downstream of the beam guiding apparatus. The spectrometer is configured to carry out a spectral analysis of the beam leaving the beam guiding apparatus. An evaluation unit is configured to establish in the observation plane a 2D concentration distribution for one or more gases in the examination volume on the basis of the spectral analysis for different variations of beam guidance.

Abstract translation: 一种装置可用于建立检查体积中的气体浓度。 辐射源被配置为产生电磁波束。 光束引导装置布置在辐射源的下游。 光束引导装置被配置为在检查体积中的观察平面中设置进入光束引导装置的光束的多个波束引导变化。 光谱仪布置在光束引导装置的下游。 光谱仪被配置为对离开光束引导装置的光束进行光谱分析。 评估单元被配置为基于对波束引导的不同变化的频谱分析，在观察平面中建立检查体积中的一种或多种气体的2D浓度分布。