公开(公告)号：US10954119B2

公开(公告)日：2021-03-23

申请号：US16997093

申请日：2020-08-19

申请人： INSTITUTE OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES (IGGCAS)

发明人： Hang Li ,  Chen Sun ,  Lianzhong Yu

IPC分类号： B81B3/00 ,  G02B26/08

摘要： A MEMS micromirror includes a mirror surface driving structure which is positioned on a substrate and includes two L-shaped structures in head-to-tail arrangement. Each L-shaped structure includes a second torsion beam, an L-shaped transverse plate and a second comb-shaped structure. The first driving electrode is provided on the substrate at a position under a head end of the L-shaped transverse plate, the head end of the L-shaped transverse plate is rotatable with support of the second torsion beam, and a tail end of the L-shaped transverse plate is connected with the second comb-shaped structure. The micromirror surface layer is disposed above the mirror surface driving structure, the first torsion beam is fixed by the substrate and supports two sides of the micromirror surface layer, and two sides, corresponding to the second comb-shaped structures, of the micromirror surface layer are provided with first comb-shaped structures, respectively.