公开(公告)号：US09798136B2

公开(公告)日：2017-10-24

申请号：US15024740

申请日：2013-10-07

Applicant: INTEL CORPORATION

Inventor： Martin Lemaire ,  Thierry Barras ,  Nicolas Abele

IPC: G02B26/08 ,  G02B7/00

CPC classification number: G02B26/085 ,  G02B7/008

Abstract: According to the present invention there is provided a method of controlling the position of a MEMS mirror in a MEMS device, wherein the MEMS device comprises, a MEMS mirror, a magnet which provides a magnetic field (B), an actuating means which operatively cooperates with the MEMS mirror so that it can apply a force to the MEMS mirror which can tilt the MEMS mirror about at least one rotational axis when the actuating means is provided with a drive signal, wherein the magnitude force applied by the actuating means to the MEMS mirror is dependent on the amplitude of the drive signal, and a detection coil which is mounted on the MEMS mirror, the method comprising the steps of, detecting a change in the resistance (R) of the detection coil so as to detect a change in temperature of the MEMS mirror; determining the drive signal amplitude required to maintain the MEMS mirror at a predefined angular position (Θ); providing the actuating means with a drive signal which has an amplitude which is equal to the determined drive signal amplitude.