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公开(公告)号：US3284197A
公开(公告)日：1966-11-08
申请号：US15015561
申请日：1961-11-06
Applicant: INTERCHEM CORP
Inventor： DANIEL SMITH , HOWARD JAMES W , GREUBEL PAUL W
IPC: G03F1/68
CPC classification number: G03F1/68
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