公开(公告)号：US20100224524A1

公开(公告)日：2010-09-09

申请号：US12279851

申请日：2007-04-04

申请人： Ichiro Yuasa ,  Yuichi Maruyama ,  Terukazu Toki ,  Isao Fukazu

发明人： Ichiro Yuasa ,  Yuichi Maruyama ,  Terukazu Toki ,  Isao Fukazu

IPC分类号： B65D85/48

CPC分类号： H01L21/6734 ,  B65D85/48

摘要： The present invention relates to a substrate cassette that houses a plurality of horizontally oriented substrates in multiple levels in the vertical direction and in which support bars are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame formed on the back of the opposite side from the substrate insertion side.

摘要翻译： 本发明涉及在垂直方向上容纳多个水平取向的多个基板的衬底盒，并且其中布置有支撑杆以支撑衬底以便抑制每个衬底的中心部分的弯曲，其中垂直 在支撑杆与形成在与基板插入侧相反侧的背面上形成的框架之间设置有用于调整支撑杆在垂直方向上的变形的方向调整机构。

公开(公告)号：US20100224523A1

公开(公告)日：2010-09-09

申请号：US12279849

申请日：2007-04-04

申请人： Ichiro Yuasa ,  Yuichi Maruyama ,  Terukazu Toki ,  Isao Fukazu

发明人： Ichiro Yuasa ,  Yuichi Maruyama ,  Terukazu Toki ,  Isao Fukazu

IPC分类号： B65D85/48 ,  F16M13/00

CPC分类号： B65G49/062 ,  B65G2249/02 ,  H01L21/6734 ,  H01L21/67343

摘要： The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to inhibit bending of the central portion of each substrate, comprising: an upper plate made of a carbon fiber composite material; a lower plate made of a carbon fiber composite material; and an intermediate member disposed between the upper plate and the lower plate, and made of a material other than a carbon fiber composite material.

摘要翻译： 本发明涉及一种用于在垂直方向上以多个级别容纳多个水平取向的基板的基板盒中的基板盒支撑杆，该基板被布置成禁止每个基板的中心部分的弯曲，包括： 由碳纤维复合材料制成的上板; 由碳纤维复合材料制成的下板; 以及设置在上板和下板之间的由碳纤维复合材料以外的材料制成的中间部件。

公开(公告)号：US20080247857A1

公开(公告)日：2008-10-09

申请号：US12079174

申请日：2008-03-25

申请人： Ichiro Yuasa ,  Yuichi Maruyama ,  Terukazu Toki ,  Isao Fukazu

发明人： Ichiro Yuasa ,  Yuichi Maruyama ,  Terukazu Toki ,  Isao Fukazu

IPC分类号： B66F11/00

CPC分类号： H01L21/67742 ,  B25J9/0012 ,  B65G49/061 ,  B65G49/067

摘要： An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.

摘要翻译： 衬底传送机器人的末端执行器包括由纤维增强塑料（FRP）制成的上板; 纤维增强塑料（FRP）制成的下板; 以及布置在上板和下板之间的中间构件，并且选自铝，不锈钢和蜂窝状纤维增强塑料（FRP）。 此外，衬底输送机器人配备有上述端部执行器。