公开(公告)号：US20240331178A1

公开(公告)日：2024-10-03

申请号：US18308223

申请日：2023-04-27

Applicant: Industrial Technology Research Institute

Inventor： Chia-Hung CHO ,  Yi-Sha KU ,  Cheng-Kang LEE

IPC: G06T7/521 ,  G01B11/22

CPC classification number: G06T7/521 ,  G01B11/22 ,  G06T2207/10028

Abstract: A measuring device includes a light source unit, a light modulation unit, a spectrum sensing unit, an image sensing unit, and a processing unit. The light source unit projects a first light path to a sample and receives a second light path reflected from the sample. The light module unit tilts the second light path to become a third light path or a fourth light path. The spectrum sensing unit receives the third light path to capture a spectrum corresponding to the microstructures. The image sensing unit receives the fourth light path to measure a captured image that corresponds to the sample. When the processing unit identifies the position of at least one of the microstructures in the captured image, the processing unit measures the depth of at least one of the microstructures from the spectrum for the identified area.